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4 Inch CZ Prime Silicon Wafer With Insulating Thermal Oxidation Film Thickness 300nm 4"

Categories Silicon Wafer
Brand Name: PAM-XIAMEN
Place of Origin: China
MOQ: 1-10,000pcs
Price: By Case
Payment Terms: T/T
Supply Ability: 10,000 wafers/month
Delivery Time: 5-50 working days
product name: powerway Silicon Wafer
brand: powerway
Dopant: Boron
Crystalline structure: Monocrystalline
other name: powerway Wafer
size: 4 inch
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4 Inch CZ Prime Silicon Wafer With Insulating Thermal Oxidation Film Thickness 300nm 4"

4 Inch CZ Prime Silicon Wafer With Insulating Thermal Oxidation Film Thickness 300nm 4"


PAM-XIAMEN offer silicon dioxide wafer (Thermal Oxide (SiO2) on Silicon Wafers) size from 2” to 6” taken place from 850°C up to 1200°C , SiO2 thin film layers on substrate is mainly used as dielectric material and more recently, which are integrated in MEMS (Micro Electro Mechanical Systems) devices., currently the simplest way to produce silicon oxide layers on silicon wafers is to oxidize silicon with oxygen. Usually, thermal oxidation is made on both faces of a silicon wafer. To get only one side oxidized, a protection is used, then the opposite side is dissolved in BHF. As the thermal oxidation is made by run of 25 to 50 wafers and the dissolution is made wafer by wafer; double and single side silicon oxide wafers can be purchased in the same batch.


4inch CZ Prime Silicon Wafer With Insulating Thermal Oxidation Film Thickness 300nm 4"

TypeConduction TypeOrientationDiameter(mm)Resistivity(Ω•cm)
CZN&P<100><110>&<111>50-3001-300
MCZN&P<100><110>&<111>50-2001-300
Heavy-dopingN&P<100><110>&<111>50-2000.001-1

ParameterUnitValue
Crystalline structure-Monocrystalline
Growth technique-CZ
Crystal Orientation-100±0.5°
Conductance type-P
Dopant-Boron
Diametermm100
ResistivityΩ/cm2>10Ωcm
Thicknessum675 ± 25µm
TTVum≤15 um
Warpum≤35 um
(G)STIRumCustomer standard
Site Flatness-STIRumCustomer standard
Edge Exclusion ZonemmSEMI STD or Customer Request
LPD's-0.3µm, <qty30 or Customer Request
Oxygen Concentrationppma<1E16/cc
Carbon Concentrationppma<1E16/cc
RRG-≤15%
Front Surface-Polished
Back Surface-Polished
Edge Surface ConditionSEMI STD or Customer Request
Primary Flat LengthmmSEMI STD
Primary Flat Orientation(100/111) & Angle(°)SEMI STD
Secondary Flat LengthmmSEMI STD
Secondary Flat Orientation(100/111) & Angle(°)SEMI STD
Laser mark-SEMI STD or Customer Request
The insulating thermal oxidation film thickness 300nm
PackagingPackaged in a class 100 clean room environment,
Heat-sealed plastic inner/aluminium foil outer bags,
Vacuum Packing
If specific requirement by customer, will adjust accordingly

How is Thermal Oxide Applied to Silicon Wafers?

Regularly there are three detail application:

1/Grown Dry Oxidation - By default dry oxide is grown on just one side of the wafer.

2/Wet Oxidation Grown - Wave guides technology and Silicon on Insulator wafers (SOI) can benefit greatly from our thick Thermal Oxide layers. We provide thermal oxide up to 15um in thickness. Grown on both sides of the wafers by default.

3/Deposited CVD - When you cannot oxidize Silicon, then you can use Chemical Vapor Deposition to deposit the oxide on top of your substrate.


Are You Looking for an Silicon Wafer?

PAM-XIAMEN is your go-to place for semiconductor wafers, including Silicon wafers, as we have been doing it for almost 30 years! Send us enquiry to learn more about the wafers that we offer and how we can help you with your next project. Our group team can give you technology support. send us email at sales@powerwaywafer.com or powerwaymaterial@gmail.com

Product Tags:

float zone wafer

  

cz silicon wafer

  
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